Founded in 1984, Novellus Systems Inc. is a leading supplier of chemical vapor deposition (CVD), physical vapor deposition (PVD), electrochemical deposition (ECD), chemical mechanical planarization (CMP), ultraviolet thermal processing (UVTP), and surface preparation equipment used in the manufacturing of semiconductors. The company’s legacy CVD, PVD, and ECD products are used to dep ...More

Founded in 1984, Novellus Systems Inc. is a leading supplier of chemical vapor deposition (CVD), physical vapor deposition (PVD), electrochemical deposition (ECD), chemical mechanical planarization (CMP), ultraviolet thermal processing (UVTP), and surface preparation equipment used in the manufacturing of semiconductors. The company’s legacy CVD, PVD, and ECD products are used to deposit extremely thin films of insulating and conductive materials that are used to create the wiring on a chip. Other Novellus products are used to clean the surface of the chip in-between manufacturing steps (surface preparation), to polish the surface of the device to ensure a flat (planar) surface (CMP), or to post-treat deposited films in order to improve mechanical properties (UVTP). As circuit geometries decrease in size, the deposition, surface preparation, CMP, and film treatment systems manufactured by Novellus become increasingly critical technologies for manufacturing advanced semiconductor devices.